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Analytical design of MEMS variable capacitors based on shaped-finger comb-drives
(SPRINGER HEIDELBERG, 2022)
A variable capacitor is one of the widely used components in radio frequency (RF) circuits. Variable capacitors can benefit from the microelectromechanical systems (MEMS) technology, to be equipped with attractive ...
AlN Piezoelectric Quad-Actuators for 2D Optical Micro Scanning
(TAYLOR & FRANCIS LTD, 2022)
Piezoelectric actuation has been one of the frequent choices for
optical micro scanning. In most of the cases, lead zirconate titanate
(PZT) has been used as the piezoelectric material. However, PZT has
a potential issue ...