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AlN Piezoelectric Quad-Actuators for 2D Optical Micro Scanning
(TAYLOR & FRANCIS LTD, 2022)
Piezoelectric actuation has been one of the frequent choices for
optical micro scanning. In most of the cases, lead zirconate titanate
(PZT) has been used as the piezoelectric material. However, PZT has
a potential issue ...
Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators
(IEEE, 2021)
Aluminum nitride (AlN) started to draw
attentions as a material for piezoelectric actuation owing to its
CMOS process compatibility and safeness for biomedical
applications. Due to its relatively low piezoelectric ...