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Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators
(IEEE, 2021)
Aluminum nitride (AlN) started to draw
attentions as a material for piezoelectric actuation owing to its
CMOS process compatibility and safeness for biomedical
applications. Due to its relatively low piezoelectric ...
Analysis of optical gyroscopes with vertically stacked ring resonators
(TUBITAK SCIENTIFIC & TECHNICAL RESEARCH COUNCIL TURKEYATATURK BULVARI NO 221, KAVAKLIDERE, ANKARA 00000, TURKEY, 2021)
Without any moving part, optical gyroscopes exhibit superior reliability and accuracy in comparison to mechanical sensors. Microring-resonator-based optical gyroscopes emerged as alternatives for bulky conventional Sagnac ...