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Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators
(IEEE, 2021)
Aluminum nitride (AlN) started to draw
attentions as a material for piezoelectric actuation owing to its
CMOS process compatibility and safeness for biomedical
applications. Due to its relatively low piezoelectric ...
Design of Mechanically Tunable Optical Filters with Microring Resonators
(IEEE, 2015)
Design strategies for the mechanically tunable
optical filters with microring resonators and comb-drive
actuators are discussed. Electromechanical simulation results are
combined with the electromagnetic analysis of the ...
Design of capacitive micromachined ultrasonic transducers (CMUTs) on a flexible substrate for intravascular ultrasonography (IVUS) applications
(IEEE345 E 47TH ST, NEW YORK, NY 10017 USA, 2017)
Effects of substrate bending to the characteristics of capacitive miniaturized ultrasonic transducers (CMUTs) on a flexible substrate are studied through finite element analysis (FEA) for the design purpose. The target ...
An FEM Study of Die Attach Packaging Effect on Nanomechanical Si Optical Filters
(IEEE345 E 47TH ST, NEW YORK, NY 10017 USA, 2017)
This paper presents a finite element analysis of die attach packaging stress effect on emerging nanomechanical silicon optical filters. The proposed silicon optical filter is composed of Si waveguides and a microring ...
Symmetric Electret-Based Vibration Energy Harvesters with Curved-Beam Hinges
(Institute of Electrical and Electronics Engineers Inc., 2023)
Broadband power spectral characteristics are
desirable in vibration energy harvesters, and it can be achieved
by employing curved-beam hinges, which exhibit forcedisplacement nonlinearity. Via numerical analysis by ...